CTI-Cryogenics' pioneering cryopumps with fully integrated controls and supporting peripherals speeds integration and system operation- Consistent process performance
- Higher tool productivity via significantly increased cryopump uptime
- Regenerates in half to one-third the time of a typical Cryo-Torr® cryopump application
- Fast Regen capability extends cryopump performance between regenerations
- Simultaneous regeneration capability, enabled by networking your cryopumps, speeds overall system regeneration, increasing tool uptime
- GOLDLink® compatible for productivity protection 24/7, worldwide
- Backed by legendary Helix service and support, worldwide
On-Board Cryo-Pump Model |
4F |
8 |
8F |
10 |
10F |
400 |
Pumping Speeds - liters/sec. |
||||||
Water Vapor |
1,100 |
4,000 |
4,000 |
9,000 |
9,500 |
17,500 |
Air |
370 |
1,500 |
1,500 |
3,000 |
|
6,000 |
Hydrogen |
370 |
2,500 |
2,200 |
5,000 |
|
12,000 |
Argon |
310 |
1,200 |
1,200 |
2,500 |
|
5,000 |
Capacity - std. liter |
||||||
Argon |
210 |
1,000 |
1,000 |
2,000 |
|
2,500 |
Hydrogen (5x10-6 Torr) |
3 |
17 |
12 |
24 |
24 |
42 |
Nominal Regeneration Time (cold to cold) |
||||||
First & Second Stage |
75 min. |
2.5 hrs |
2.5 hrs |
2.5 hrs |
2.5 hrs |
3 hrs |
Second Stage |
<1 hr |
<1 hr |
<1 hr |
<1 hr |
<1 hr |
<1.5 hrs |
On-Board Waterpumps
50% to 75% reduction in time to base pressure- Higher yields through reduced water vapor and lower contamination
- Temperature control for selective water vapor pumping. No gate valve required
- Low-cost installation and operation
- Advanced On-Board control system for process optimization and monitoring, predictive maintenance, network pump management, and ease of use
- Compatibility with other On-Board pumps
Cryo-Torr Cryopumps
CTI Cryogenics’ original cryogenic high-vacuum pump- Dependable bottom-line performance
- Add your own customized controls and supporting peripherals
- Clean, reliable high speed pumping for critical vacuum process applications
- Fast maintenance and low operating costs
Cryo-Torr Cryopump Model |
8 |
>8F |
>10 |
Pumping Speeds - liters/sec. |
|||
Water Vapor |
4,000 |
4,000 |
9,000 |
Air |
1,500 |
1,500 |
3,000 |
Hydrogen |
2,500 |
2,200 |
5,000 |
Argon |
1,200 |
1,200 |
2,500 |
Capacity - std. liter |
|||
Argon |
1,000 |
1,000 |
2,000 |
Hydrogen (5x10-6 Torr) |
12 |
8 |
24 |
Cryo-Torr 20HP High Performance Cryopump
Extreme high pumping speeds insure faster pump down times- New cryogenic refrigerator design allows for high temperature operation and greater vacuum reliability
- Oil-free operation eliminates high LN2 costs while providing better vacuum quality
- Fast and easy maintenance
- Perfect solution for metal deposition, optical coating, space simulation and other applications, such as, flat panel display manufacturing
Performance and Features |
|
Pumping Speeds - liters/sec. |
|
Water Vapor |
31,500 |
Air |
10,000 |
Hydrogen |
15,000 |
Argon |
8,400 |
Capacity - std. liter |
|
Hydrogen |
46 |
Argon |
5,700 |
Throughput - Sccm |
|
Argon |
1,500 (19 Torr-Liters/Sec) |
Cooldown Time - Minutes |
|
@ 50 Hz Power |
150 |
@ 60 Hz Power |
140 |
Cryopump Mounting Flange Dimensions |
|
20 inch ANSI |
27.5 inch / 699 mm OD |
Cryopump Weight |
|
160 lbs |
72 kg |
System Electrical Requirements |
|
Nominal Voltage |
200/220 VAC 3-Phase @ 50/60 HZ |
Nominal Input Power |
7.5 kW @ 60 HZ |
Operating Range |
200 - 230 @ 60 HZ |
Argon |
5,700 |
System Cooling Requirements |
|
Water Flow |
1.3 - 4.0 gpm |
Compressors
8200 Compressor:
- Optimum performance with On-Board Cryopumps, Waterpumps and Cryo-Torr Cryopumps
- Supports all pumps up to 8 inches
- Designed for flexibility
9600 Compressor:
- Designed for upscale life, high reliability, and easy use
- Outstanding performance with all Cryo-Torr Cryopumps, On-Board Cryopumps, WAterpumps, and TurboPlus Vacuum Pumps
- Supports both singe and grouped pump configuration and is compatible with new and existing CTI Cryogenics pumping installations
9700A Compressor:
- Based on the 9600 Compressor platform
- Incrased helium output
- Ideal for operating multiple cryopumps
Cryodyne Refrigerators
- Made up of a family of two stage, closed cycle helium refrigeration systems based on the Gifford-McMahon thermodynamic cycle
- Offers usable heat lift from <10K to >80L for a variety of research and commercial applications
Refrigeration system consists of a refrigerator assembly, compressor assembly and customized installation kit, including, flexible interconnecting gas lines and refrigerator cable ranging from the standard 10-foot separation length up to 300-foot lengths
